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GB/T 48095-2026
Measurement method for topographic parameters of high-aspect-ratio microstructures utilize microscopic interferometry
GB/T 48095-2026 高深宽比微结构形貌参数显微干涉测量方法
- Issue date
- 2026-08-28
- Effective date
- 2027-03-01
- Standard type
- National Standards
- ICS / CCS
- 17.180.99 / L50
- Issuing authority
- State Administration for Market Regulation and Standardization Administration of China
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Scope
This document describes the measurement principle, measuring device, measurement environment, samples, measurement procedure, data processing and measurement report of the microscopic interferometry method for measuring the topographic parameters of high-aspect-ratio microstructures. This document is applicable to the inspection and measurement of the topographic parameters of high-aspect-ratio microstructures with an aspect ratio of not more than 50 in micro/nano devices that are transparent to visible or near-infrared light.
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